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2013

Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric, A. C. Kozen, M. A. Schroeder, K. D. Osborn, C. J. Lobb, and G. W. Rubloff , Appl. Phys. Lett., 102 (2013)

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