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Protection layers on a superconducting microwave resonator toward a hybrid quantum system

TitleProtection layers on a superconducting microwave resonator toward a hybrid quantum system
Publication TypeJournal Article
Year of Publication2015
AuthorsJ. Lee, and D. Hun Park
JournalJOURNAL OF APPLIED PHYSICS
Volume118
Date PublishedOCT 7
ISSN0021-8979
DOI10.1063/1.4932137