|Title||Mechanically compliant grating reflectors for optomechanics|
|Publication Type||Journal Article|
|Year of Publication||2012|
|Authors||U. Kemiktarak, M. Metcalfe, M. Durand, and J. R. Lawall|
|Journal||Appl. Phys. Lett.|
|Keywords||dielectric materials, diffraction gratings, Fabry-Perot resonators, membranes, No Fellows, optical elements, Q-factor, silicon compounds|
Mechanically compliant grating reflectors for optomechanics
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