Chip-based photonic sensors for metrology and applications
Photonic sensors are of crucial importance in modern science and industry. They can be designed to be ultra-sensitive to certain physical quantities. Many photonic sensors are compatible with CMOS technology and can be integrated on chips for use as highly sensitive, small scale and low cost sensors. In this thesis we focus on two types of photonic sensors: microring resonator and high contrast grating membrane, including their fabrication, theoretical basis, experimental characterizations, and their applications to the measurement of two fundamental physical quantities--temperature and length respectively. We also study theoretically the buckling transition due to the optomechanical interaction between light and the grating membrane, which can be observed using our displacement sensing technique.
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